Abstract
The FePt films with thickness of 4−10nm were deposited on MoC/CrRu/glass at substrate temperature ranged from 260 to 410°C by using magnetron sputtering and strong (001) textured FePt films were obtained at 380°C and 410°C. The multi-functional MoC conductive intermediate layer was used to resist the Cr diffusion and promote the epitaxial growth of the (001) textured FePt film which shows perpendicular magnetization and a linear-like in-plane magnetic loop. The out-of plane coercivity and shape of demagnetization curve were dominated by the ordering degree and perpendicular magnetic anisotropy which were increased with deposited temperature. The FePt film deposited at 290°C shows continuous morphology and change to interconnected structure at 350°C and finally form the island like structure at 380°C and 410°C. Each island contains many FePt grains and the smaller grains size was 12.2nm which obtained at 5nm thick FePt film. Perpendicular anisotropy of 1.1×107erg/cm3 and coercivity of 8.2kOe have been demonstrated in 7nm thick FePt film.
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