Abstract
Fe/Ni–Fe multilayered films are formed by the ion beam sputtering method. Their magnetic properties and film structures are examined. As the period of the Fe/Ni–Fe multilayered films is reduced, the Fe crystallite diameter and the magnetic anisotropy dispersion become small and the soft magnetic properties are improved. The Fe/Ni–Fe multilayered film, whose period is 25 nm, displays a coercive force of 90 A/m, a relative permeability of 1900, a saturation magnetic flux density of 1.9 T, and a magnetostriction constant of 8×10-7. It is thought that the reduction of magnetic anisotropy dispersion improves the soft magnetic properties of Fe/Ni–Fe multilayered films.
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