Abstract
In this work, we report the magnetic properties, domain structures and high frequency properties of FeCoAlON alloy films prepared by reactive magnetron sputtering. With increasing N addition content, the films transfer from in-plane anisotropic properties to isotropic behavior. The obvious stripe domain structure is observed in the films with high N content, and the domain parameters depend on the thickness of the films. The XRD analysis indicates that the stripe domain may origin from the stress-induced perpendicular anisotropy by Al, O and N addition. Meanwhile, a double-peak resonance behavior is observed in the permeability spectra of the films with stripe domain structure.
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