Abstract
Abstract FePt–(C4F8)n granular films have been prepared by facing targets sputtering method with plasma polymerizing reaction. The FePt alloy was deposited on fused quartz substrate as same as the (C4F8)n matrix was polymerized. Then, they were annealed at 600°C in reduced air. Their magnetic properties and fine structures were investigated. The films prepared at C4F8 partial pressures of 0.10 and 0.20 mTorr, which consisted of fine FePt particles with a size of 5–10 nm, had high coercivities of 4–8 kOe caused by the stress between FePt particles and fluorocarbon matrix.
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