Abstract
Recently, field emission sources in combination with either magnetic or electrostatic microlenses have been predicted to produce electron beams with high brightness and low aberrations. The key advantage to such systems is the short focal length and thus small coefficients of spherical and chromatic aberration. In addition, by using either small apertures or extremely sharp emission sources, the emission angle can be made small and thus the effect of the aberrations reduced further. We present here our initial results on building a magnetic microlens system. The unique feature of this work is the use of permanent magnets as the sole focusing elements in the lens, resulting in an extremely simple and inexpensive system.It has been shown that the aberrations in a focused electron beam can be reduced by selectively scaling the column dimensions. The focused spot sized is limited by the spherical aberrations,and the chromatic aberrations
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Proceedings, annual meeting, Electron Microscopy Society of America
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.