Abstract
Recently, field emission sources in combination with either magnetic or electrostatic microlenses have been predicted to produce electron beams with high brightness and low aberrations. The key advantage to such systems is the short focal length and thus small coefficients of spherical and chromatic aberration. In addition, by using either small apertures or extremely sharp emission sources, the emission angle can be made small and thus the effect of the aberrations reduced further. We present here our initial results on building a magnetic microlens system. The unique feature of this work is the use of permanent magnets as the sole focusing elements in the lens, resulting in an extremely simple and inexpensive system.It has been shown that the aberrations in a focused electron beam can be reduced by selectively scaling the column dimensions. The focused spot sized is limited by the spherical aberrations,and the chromatic aberrations
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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