Abstract
Sensors and actuators based on magnetic, electromagnetic, and electrodynamic principles allow the realization of a wide range of Magnetic Micro Electro-magnetic Systems (magnetic MEMS). Preconditions for fabricating such devices is the availability of enabling technologies like deposition technologies for magnetic materials or high aspect ratio micro structure technologies (HARMST) for creating coils and core structures. Examples for microsensor applications are the use of either magnetoelastic effects for strain gauge measurements and the inductive effect for measuring the properties of thin-films during the wafer fabrication of magnetic MEMS devices. Magnetic microactuation applications are for instance microactuator with latching capabilities, a rather simple micro synchronous motors, and a hard disc drive (HDD) recording head featuring a Slider with an Integrated Microactuator (SLIM) for second stage actuation.
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