Abstract
Micromachining of magnetic materials is becoming a crucial technology for futuremagnetic systems/devices such as high-density magnetic recording heads, high-densitypatterned media, magnetic quantum devices, and micro-magnetic smart systems. NiFealloy, one of the typical ferromagnetic materials, can be deposited and fabricatedusing current thin film and micromachining technologies, and it has found variousapplications in microsensors, microactuators, and microsystems. In our recent work,Ni45Fe55 alloy with the highest saturation magnetic-flux density was selected as themicro-magnet for an all-silicon quantum computer. The micro-magnetwas designed to create a large magnetic field gradient and to distinguish29Si nuclear spinsarranged as chains in a 28Si matrix with Larmor frequencies. This paper reports the micromachining of aNi45Fe55 alloy mesa structure for an all-silicon quantum computer and the preliminary evaluation ofits effectiveness using a magnetic force microscope (MFM) and a superconducting quantuminterference device (SQUID).
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