Magnetic levitation stages for planar and linear scan application with nanometer resolution1

Abstract

This article describes design rules for the magnetic constrains, the sensors and the controller for planar and linear stages for a scanning application with a resolution at nanometer level. The main advantage of magnetic levitated systems in relation to “standard” air bearing systems or mechanical guided systems is that they provide perfect cleanroom conditions. The other advantage is that there is no influence by inaccurate guiding. Because of closed-loop control in all 6 DOFs, there is also stationary accuracy and the highest repetition, which only depends on the resolution of the hysteresis-free sensor system. Most of industrial applications require free access to the movable top plate, requiring that all types of sensors should be placed below the platform. The main challenge for pushing the technology into “industry nanometer level” is how to get it to work with low-price distance sensors at nanometer resolution and a motion range of millimeters. A key point is the design of the controller structure for fast access of the actuators and many sensors, in case of the new planar system there are 24 coil pairs and 23 sensors working in the servo loop at 20 kHz.