Abstract
This paper reports a magnetic microactuator for haptic applications. The actuator consists of a Si chip and two printed circuit boards (PCBs), and the total size of the device is 7.8 mm × 7.8 mm × 2.4 mm. A tiny magnet is embedded into the Si chip and actuated by a current flowing in the PCBs. The mechanical and electrical parts are separated on the Si chip and the PCBs, respectively, and there is no electrical connection between them, allowing simple fabrication and assembly. The magnet, made from a mixture of SmFeN magnetic powder and wax, exhibits a large magnetic field of 0.4 T. The magnet is supported by soft springs of parylene, enabling a large displacement amplitude, a low resonance frequency, and high mechanical robustness. The measured resonance frequency and amplitude are 139 Hz and 62 µm, respectively. The rise and fall times of the vibration of the device at 100 mA drive are 19 ms and 52 ms, respectively. Sensory analysis revealed that the haptic device created the haptic sensation on a scale of three, weak, medium, and strong intensity, with input currents from 50 mA to 200 mA.
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