Magnetic field tunable piezoelectric resonator for MEMS applications

Abstract

In this report, the Ni0.50Mn0.35In0.15/Pb0.96La0.04Zr0.52Ti0.48O3 (Ni-Mn-In/PLZT) bulk acoustic wave (BAW) resonator has been fabricated using the sputtering deposition technique. The magnetoelectric effect in the Ni-Mn-In/PLZT resonator has been investigated. The increase in magnetoelectric coupling coefficient (MECC) with the increment in the frequency of applied HAC is observed. The potential of the Ni-Mn-In/PLZT BAW resonator as a magnetic sensor is tested by measuring the shift in the resonant frequency of the reflective (S11 parameter) response in the presence of the externally applied magnetic field. The Ni-Mn-In/PLZT resonator exhibits a frequency shift of 730 MHz in the 1200 Oe magnetic field, among the largest magnetic field-induced frequency shifts in literature. The rarely reported complete dependence of acoustic velocity, coupling coefficients, magnetic sensitivity, and frequency peak shift on the strength of the external magnetic field is investigated. The acoustic velocity increases from 1237 m/s to 1394 m/s, and the electromechanical coupling coefficient increases from 0.0199 % to 0.0206 % after applying the 1200 Oe magnetic field. The reflective responses have been fitted using the Modified-Butterworth Van Dyke (MBVD) model in terms of hardly reported RLC equivalent circuits. The experimental results and extracted parameters from MBVD modeling exhibit high accuracy. This interaction between multiferroic orders and elastic resonance peaks opens a new window for highly sensitive future magnetic field sensors, wireless communication devices, and magnetic field tunable filters.