Abstract
A detector for electron beam waveform measurement on operating integrated circuits is presented. The detector has been designed to minimize the effects of local electric fields on voltage measurements. Waveforms have been measured to 2% accuracy on lines with 0.5-μ spacings. In addition, quantitative waveforms have been measured through insulating passivation layers.
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More From: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
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