Abstract
A magnetic field superimposed field emission gun with low aberration, equipped with a zirconiated tungsten emitter, has been developed for applications where very stable high probe currents are required in submicrometer probe sizes. Probe current i = 450 nA in a probe size d = 0.5 μm is obtained at 10 kV and at 1 kV a resolution δ ∼ 50 nm is obtained with i = 4 nA. The different contributions to the probe size are also analysed, and simple approximate formulae are given that determine the upper limit of the current that it is possible to get in a given probe size. At low voltage the spatial broadening effect due to electron-electron interactions in the beam seems to be important limiting factor.
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