Abstract

Instabilities in a cross-field discharge around a permanent magnet have been investigated. The permanent magnet serves as a cold cathode and the chamber wall as an anode. The magnet is biased strongly negative and emits secondary electrons due to impact of energetic ions. The electrons outside the sheath are confined by the strong dipolar magnetic field and by the ion-rich sheath surrounding the magnet. The electron energy peaks in the equatorial plane where most ionization occurs and the ions are trapped in a negative potential well. The discharge mechanism is the same as that of cylindrical and planar magnetrons, but here extended to a 3-D cathode geometry using a single dipole magnet. While the basic properties of the discharge are presented in a companion paper, the present focus is on various observed instabilities. The first is an ion sheath instability which oscillates the plasma potential outside the sheath below the ion plasma frequency. It arises in ion-rich sheaths with low electron supply, which is the case for low secondary emission yields. Sheath oscillations modulate the discharge current creating oscillating magnetic fields. The second instability is current-driven ion sound turbulence due to counter-streaming electrons and ions. The fluctuations have a broad spectrum and short correlation lengths in all directions. The third type of fluctuations is spiky potential and current oscillations in high density discharges. These appear to be due to unstable emission properties of the magnetron cathode.

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