Abstract
L10-FePt films are fabricated layer by layer using the magnetic sputtering technique at different growth temperatures. Structure, ordering process and magnetic properties of the films are studied. The film is partly ordered at the growth temperature of 300°C, and reaches a completely ordered state at deposition temperature of 400°C. With increasing the substrate temperature from 400°C to 500°C, the out-of-plane coercivity increases dramatically from 5.69KOe to 16.3KOe, and the magnetic anisotropy Ku increases from 2.0×107erg/cm3 to 4.5×107erg/cm3. The surface structure of the film varies with the growth temperature. We attribute the temperature dependence of magnetic properties to the decreased tetragonal distortion at high temperature.
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