Abstract
We investigate magnetic and structural properties of the sputtered thick Co2FeSi (CFS) alloy films. X-ray diffraction measurements show CFS alloy film changes from amorphous to disordered A2 structures after annealing, which leads to pronounced increase in saturation magnetization. For the as-deposited films in-plane uniaxial magnetic anisotropy is determined to be in the range of 103–104 erg/cm3, showing strongly dependent to film thickness. After annealing a fourfold cubic magnetic anisotropy is witnessed. Structural ordering is observed to improve with increasing film thickness. Similiar trend of the magnetic anisotropy with sputtering power is witnessed, which can be explained by equivalent annealing effect of the high-power sputtering. Our results show that magnetic anisotropy properties of the CFS alloy films are strongly dependent to film thickness and structural ordering, tuned by anealing tempeature and sputtering power. These findings may be helpful for designing Co2FeSi-based spintronic devices.
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