Abstract
An abbreviated review of recent experiments performed in argon inductive discharges at OSRAM SYLVANIA Research Center is given in this presentation. Results of three different diagnostic methods (Langmuir probe, magnetic probe and measurement of the external electrical discharge characteristics) are presented here. The measurements were done in an axially symmetric, co‐axial configuration with an internal exciting coil driven at 13.56 MHz. For the first time, the electron energy distribution function, plasma density and effective electron temperature and the radial distributions of rf electric field and discharge current density were measured altogether in an inductive discharge in argon ranging over three orders of magnitude in gas pressure. Some specifics of electrostatic and magnetic probe diagnostics in inductively coupled discharges are discussed.
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