Abstract
Magnesium oxide (MgO) sensing membranes in pH-sensitive electrolyte-insulator-semiconductor structures were fabricated on silicon substrate. To optimize the sensing capability of the membrane, CF4 plasma was incorporated to improve the material quality of MgO films. Multiple material analyses including FESEM, XRD, AFM, and SIMS indicate that plasma treatment might enhance the crystallization and increase the grain size. Therefore, the sensing behaviors in terms of sensitivity, linearity, hysteresis effects, and drift rates might be improved. MgO-based EIS membranes with CF4 plasma treatment show promise for future industrial biosensing applications.
Highlights
Magnesium oxide (MgO) sensing membranes in pH-sensitive electrolyte-insulator-semiconductor structures were fabricated on silicon substrate
Since the first ion-sensitive field-effect transistors (ISFETs) was invented by Bergveld in 19701 and the first pH-ISFET was proposed by Caras and Janato[2], various kinds of ISFET-based biochemical sensors have been evolved
Nb2O55, CeO26, and Sm2O37 have been demonstrated as good sensing film materials and the experimental data approve that the ISFET-based sensors incorporating some materials can achieve excellent sensing capability
Summary
Magnesium oxide (MgO) sensing membranes in pH-sensitive electrolyte-insulator-semiconductor structures were fabricated on silicon substrate. MgO-based EIS membranes with CF4 plasma treatment show promise for future industrial biosensing applications. Intensive studies have been conducted to the development of ion-sensitive field-effect transistors (ISFETs) or electrolyte-insulator-semiconductor (EIS) sensors within the last forty decades. For the sensing material is one of the key factors in the device sensing applications, there are still some material related problems that may cloud future development of the ISFET-based sensors such as dangling bonds on the sensing membrane and insufficient isolation between the chemical solution/device interface[4]. PH sensitivity, linearity, hysteresis, and drift rates were measured to study the sensing behaviors These comprehensive studies of the MgO-based EIS biosensors investigate the biochemical sensing properties of MgO-based biosensors and the surface material reaction of the MgO membrane. Possible integration of MgO-based or MgO composite material-based devices may be developed, stemming from the solution/MgO interface research
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