Abstract
The magnesium(II) hydrotris(1-pyrazolyl)borate, Mg[BH(pz) 3] 2, complex has been, for the first time, tested as a precursor for the metal organic chemical vapor deposition (MOCVD) of borate phase thin films. The thermal analyses of this source reveal high volatility and good thermal stability with a low residue left despite its relatively high melting point. In particular, the compound has been successfully applied to the MOCVD fabrication of Mg 2B 2O 5 films, and therefore it represents a suited and reliable single source precursor of borate phases. Mg[BH(pz) 3] 2 provides constant evaporation rates even for very long deposition times and, hence, highly homogeneous films of carefully controlled thickness.
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