Abstract
Excellent anti‐wear performance, high bearing capacity, and long service life are essential prerequisites for the reliability and durability of Si‐based micro/nano device operation. To improve the anti‐wear property and prolong service life of Si‐based micro/nano devices under high loads, graphene oxide (GO) nanosheets, graphene quantum dots (GQDs) and ionic liquid‐capped GQDs (IL‐GQDs) were used to create three kinds of multilayer films as solid lubricant, that is, single‐component (GO)5, (GO/GQDs)5 and (GO/IL‐GQDs)5 multilayer films. The results showed that (GO/IL‐GQDs)5 composite multilayer possessed excellent wear resistance under a high load of 4 N with the wear rate of 4.9×10‐7 mm3·N‐1·m‐1. The superior anti‐wear performance of (GO/IL‐GQDs)5 composite film is mainly due to the unique 3D structure composed of GO nanosheets alternating with IL‐GQDs. The rigid GO nanosheets play the role in load‐carrying capacity, and the IL‐GQDs could delay the time of structure transformation and reduce the loss rate of transfer film, thereby effectively extending the service life of (GO/IL‐GQDs)5 composite multilayer. Such multilayers are expected to be good solid lubricating films suitable for Si‐based micro/nano devices.This article is protected by copyright. All rights reserved.
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