Abstract
Triangular grating has an important application in modern optical field. The large-scale production of such components can be realized by injection molding process, among which the fabrication of optical molds is the most important technology. This paper proposed to adopt femtosecond laser-induced chemical etching to make a micro-mold based on triangular diffraction gratings. Based on theoretical analysis and processing experiments, we studied the feasibility applied to manufacture the microstructure of optical mold.
Highlights
The Triangular grating is divided into two forms of transmission and non-transmission
The focal depth is adjusted according to the process parameters, and the displacement platform is controlled to realize direct writing material; the sample is placed in hydrofluoric acid (HF) acid with a concentration of 5%, and the chemical reaction time is accurately controlled by a timer; the experimental samples are taken out and the microstructures of a processed sample is characterized by the microscope with super depth of field and atomic force microscope (AFM)
For the fabrication of triangular grating micro-mold, this paper proposed the technique method of femtosecond laser-induced chemical etching, and demonstrated the feasibility of the method by technical experiments
Summary
The Triangular grating is divided into two forms of transmission and non-transmission. For non-transmission triangular gratings, the main materials are metal or semiconductor, which are widely used in micro-optics, new energy and bioengineering. According to the current literature, there are many fabrication techniques for non-transmission triangular gratings, and the technological level is relatively mature.. The technology of transmission triangular grating needs further study. For phasetype optical diffraction structures, PMMA is generally exploited as a raw material, and mass production is achieved by injection molding.. The injection molding process requires a high-precision optical micro-mold, and it makes sense to find a simple and straightforward method to make the mold. The fabrication of optical micro-mold adopts the traditional lithography method, which involves coating, exposure, development and dry etching. The production efficiency of traditional lithography method is not high
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