Abstract
An ultra precision CNC machine was develop for manufacturing high precision mirrors. The machine is capable of machining large aspheric mirrors up 650 mm in diameter and 250 mm in axial length. Laser interferometer feedback system, with 2.5 nm resolution, are incorporated in both X and Z slide motions. Using this machine, a concave mirror, made from an electroless nickel plated aluminum material, was finished by diamond turning. The mirror had a form accuracy of less than 0.1 μm P-V, and a 2 nm Ra surface roughness.
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