Abstract
Light-driven actuators are effective for a miniaturization of micro devices because those actuators can be driven by non-contact energy supply. PLZT is a ferroelectric material which has a photostrictive effect. In this study, PLZT polycrystalline film has been deposited on a titanium substrate by using a hydrothermal method. In addition, the 2 types of actuators have been fabricated by depositing ITO transparent electrode on the surface of the PLZT film. One actuator has a square type electrode and the other has a comb type electrode. The displacement and electric current was evaluated when the actuators were driven by the ultraviolet light.
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