M3-6 偏光した近接場光を用いたナノスケール温度・熱物性測定手法の開発(M3 熱流体デバイス)

Abstract

Measurement of temperature distribution at nanoscale is absolutely important for the thermal design of high integrated devices. However, in conventional optical measurement techniques, the spatial resolution is limited by the diffraction limit of light, which is approximately half of the wavelength of the optical beam. Therefore, we have developed a novel optical nanoscale temperature measurement method using near-field microscope technique. We newly employed the polarization of light into the measurement principle, since the near-field polarization has a high sensitivity for the refraction index of the sample, which varies with temperature. In this method, highly polarization maintaining near-field optical fiber probe is necessary for increasing the measurement sensitivity. Hence, we have newly fabricated the single mode near-field optical fiber probe. In this paper, we report the verification of the new measurement principle and the comparison of the measurement sensitivity with the results using temperature dependence of reflectance.