Abstract
Atomic layer deposited (ALD) ZrO2 (zirconia) thin films doped with Er3+ ions by ion implantation as well as ZrO2/Er2O3 nanolaminates were investigated at wide 5–300 K temperature range using cathodoluminescence (CL) and photoluminescence (PL) spectroscopy under wide range of excitation energies 6–120 eV. In the studied ALD films main emissions due to self-trapped excitons and defect centers were revealed in UV-visible (VIS) region with the excitation bands in the host absorption. In nanolaminates luminescence processes are influenced by their structure and composition. In films with the lower Er3+ ion content, typical 4f luminescence of Er3+ ions were identified being excited through energy transfer from host to doping ions. The luminescence data shows that in contrast to a few hundred nm thick ALD films, the excitonic band near 5.3–5.4 eV are absent in the excitation spectra of nanolaminates with a typical layer thickness of 5 nm, which do not facilitate exciton formation because of limited spatial regularity.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
