Luminescence of Europium–Doped Anodic Oxide Films on Multilayer Titanium–Tantalum Composites

Abstract

Luminescence of europium in anodic oxide films on thin–film Ti–Ta composites and the process of anodic oxidation of these by the method of chronovoltammetry are investigated for different orders of arrangement of metallic layers and temperatures of heat treatment. A correlation between the luminescence spectra and chronovoltammetric diagrams is noted. The luminescence is shown to be an efficient method for studying the complex phase composition of anodic oxide films. The luminescence spectra of samples are characterized by the presence of several types of luminescence centers inherent in the Eu3+ ion and the base. Conditions for the formation of Eu–doped anodic oxide films on a diffusion alloy, which are of interest for microelectronics as a new dielectric material, are determined.