Abstract
In this paper, we present structural and luminescence studies of silicon-rich silicon oxide (SRO) and SRO-SiN bi-layers for integration in emitter-waveguide pairs that can be used for photonic lab-on-a-chip sensing applications. The results from bi and mono layers are also compared. Two clearly separated emission bands are respectively attributed to a combination of defect and quantum confinement–related emission in the SRO, as well as to defects found in an oxynitride transition zone that forms between the oxide and the nitride films, while ruling out quantum-confinement phenomena in the silicon nitride.
Highlights
The use of nano-structured Si-based materials has been demonstrated to be a viable alternative for producing fully monolithic electrophotonic systems obtained solely by complementary metal oxide semiconductor (CMOS) techniques [1,2,3]
We have recently demonstrated an electrophotonic transmitter/receiver consisting of a novel, electrically pumped silicon-rich oxide (SRO)-nitride visible light-emitting capacitor (LEC) embedded into a planar Si3 N4 waveguide surrounded by silicon dioxide cladding [12]
The energies of the implantation processes were tuned according to Stopping and Range of Ions in Matter (SRIM) simulations [14] to obtain the peak of Si ion concentrations in the middle of the oxide film for the sets A and B, as well as inside the Si substrate in the set R in order to obtain SRO films with two different Si concentrations, and a reference set of films with no excess Si in the nitride nor in the oxide film, but which still underwent the implantation to assure that this process by itself did not introduce any kind of emission centers
Summary
The use of nano-structured Si-based materials has been demonstrated to be a viable alternative for producing fully monolithic electrophotonic systems obtained solely by complementary metal oxide semiconductor (CMOS) techniques [1,2,3]. Planar waveguides (WG) transmitting injected or optically stimulated visible light have shown to be very promising for application in the field of integrated optical sensors and biosensors [6]. Examples of this include integrated Raman sensors [7], sensors based on Mach-Zehnder interferometers [8,9] and spiral resonators [10], and Bragg grating sensors [11]. Most of the current approaches rely on external and non-integrated optical stimulation and detection, which significantly impacts on the integrability and cost of the systems
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