Abstract
Plasma parameters and chemical kinetics of Cl<sub>2</sub>/Ar plasma were investigated aimed at understanding the mechanism of Ar addition on mass composition of charged and neutral particles. The analysis was based on both experimental methods and plasma modeling. It was found that addition of Ar to Cl<sub>2</sub> leads to deformation of the electron energy distribution function and to increase of the electron mean energy. Direct electron impact dissociation of Cl<sub>2</sub> molecules represents the main source of chlorine atoms in plasma volume. The contributions of stepwise dissociation and ionization involving Ar metastable atoms were found to be negligible. Addition of Ar to Cl<sub>2</sub> causes the decrease of both electron and ion densities due to the decrease of the total ionization rate and the acceleration of heterogeneous decay of charged particles.
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