Abstract

In this paper, a two-axis-scanning Laser Doppler Vibrometer for micro-scale object dynamic behavior characterization is described. The system employs a two-axis acousto-optic deflectors and a telecentric lens to achieve high-precision and high-speed scanning. The newly developed vibrometer was used to measure the dynamic behavior of an entire AFM cantilever operated in free air. The 120 micrometers long, 25 micrometers wide micro-cantilever dynamic response was measured at different positions with 2 micrometers spatial resolution.© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

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