<title>Trace gas analysis by diode laser cavity ring-down spectroscopy</title>

Abstract

A new advanced infrared-based analyzer was developed to perform fast and reliable analysis of ultra trace gas impurities. The complete analytical system, the MTO-1000, is capable of measuring moisture to less than 200 parts-per- trillion (PPT) and perform single species detection of other ultra trace gas impurities such as NH<SUB>3</SUB>, CO, Hcl, HF and CH<SUB>4</SUB> to parts-per-billion (PPB) and sub-PPB concentrations. Trace moisture calibration data will be presented to demonstrate the speed of response, sensitivity and accuracy of infrared Cavity Ring-Down Spectroscopy (CRDS). Emerging broadband capability to measure multiple trace gas species by CRDS technology will also be discussed.