<title>Technological sensors on slow electromagnetic waves</title>

Abstract

ABSTRACT New methods for physical and technological parameters measurements are demonstrated. These methods are based on slow-wave structures application as sensitive elements and are using the dependence of phase velocity in slow-wave structureupon parameters of medium and the distance between slow-wave structure's conductors and between a slow-wave structureand other conductive surfaces. The phase velocity alteration leads to a sensitive element resonant frequency alteration whichcan be converted into a measuring generator frequency alteration. The peculiarities and advantages of slow-wave structure-based sensitive elements are considered. The possibility of the new method application in microelectronics and other brandsof Industiy are shown.. The practical realization of the mentioned above method have confirmed its sensitivity, accuracyand simplicity. It is shown that the use of sensitive elements based on the slow-wave structures is extremely promising indifferent technological processes and scientific research. Resistivity, pennittivity, and permeability, thickness, continuity,linear and angular displacement, vibration, and many other physical and geometric parameters can be measured with highaccurasy.Keywords: Slow-wave structure, slowed electromagnetic wave, sensitive element, electromagnetic parameters monitoring,equivalent parameters, surface resistivity.