Abstract
Problems of short period multilayer mirrors fabrication are discussed. Results of synthesis of multilayer structures with nanometer period are presented. The shortest period observed is 13 angstroms for W - Si and W - B<SUB>4</SUB>C sputtered multilayers. Measurements of near normal incidence reflectivity at (lambda) equals 31 - 32 angstroms are described for W - Sc multilayers with period about 16 angstroms. Measured reflectivity achieves 3.3% and is in good agreement with theoretical model.
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