Abstract
A detailed study of the effects of the subbing layer surface energy on the laser writing sensitivity, optical properties (reflection, transmission and absorption) and lifetime of Te and TeGe films is reported. A continuous spread of surface energies is obtained by using plasma deposited teflon and spin coatable methyltrifluoro-methylacrylate-co-methylmethacrylate polymers of a range of compositions. Based on these studies it is concluded that low surface energy surfaces do not improve the mature hole opening threshold of TeGe films and that the improvements seen for Te films are likely due to changes in the film microstructure. The observed comparatively poor lifetime performance of Te films deposited onto low surface energy surfaces can also be explained by microstructural changes.© (1983) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
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