Abstract

The paper presents silica films of the refractive index 1.267-1.420 and silica-titania films of high refractive index 1.762. Basic fabrication technology was presented as well as the applied measurement methods of refractive index and thickness. The paper provides examples for the application of the elaborated technology for the fabrication of waveguide films, input/output grating couplers and channel RIB waveguides.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.