<title>Smart photonics: optoelectronics integrated with Si CMOS VLSI circuits</title>

Abstract

Smart photonics, the integration of optoelectronic devices with electronic circuits and systems, has growing applications in many fields, one of which is computing. An exploration of the opportunities, integration technologies, and some recent results using thin film optoelectronic and electronic device integration with Si CMOS VLSI and GaAs MESFET technologies are presented herein. Applications explored herein include low cost alignment tolerant optoelectronic interconnection links for network inerconnections, smart focal plane array processing through the integration of imaging arrays with sigma delta analog to digital converters underneath each pixel, and three dimensional computational systems using vertical through-Si optical interconnections.