<title>Rapid laser scanner based on electro-optical array waveguide</title>

Abstract

A novel rapid laser electro-optical scanning system is studied. Theoretical and experimental analysis shows the feasible ofthe system. Based on the theory of optical phased array, the operating characteristic of the electro-optical waveguide array scanner, the core part of the rapid laser electro-optical scanning system, are specifically investigated. According to the theoretically result of the design parameters of the electro-optical waveguide array scanner, a 4 waveguides array is fabricated by use of AlGaAs crystal through MOCVD. By using of a designed device, steering of laser beam is realized. Experimental results of the A1GaAs-based optical scanner conformed the performance of the scanning system, such as rapid scanning (0~10MHz) and wide scan zone (30 Deg).