<title>Precision piezoelectric stepping motor using piezoelectric torsional actuator</title>

Abstract

This paper deals with a newly developed piezoelectric motor that generates precise stepping motion using a piezoelectric torsional actuator and a pair of one-way clutch bearings. The torsional actuator consists of a piezoelectric cylinder that produces rotation motion invoking shear mode of piezoelectric materials and a torsion bar that magnifies the rotation angle produced from the piezoelectric cylinder. Inner one-way clutch bearing is fit on the torsion bar and outer bearing is mounted outside of the inner bearing such that when the torsion bar rotates in one direction, the inner bearing moves together while the outer one slips. When the torsion bar rotates in opposite direction, the inner bearing slips against the torsion bar while the outer bearing locks the inner bearing so as to accumulate the rotation angle. Because the elaborate piezoelectric torsional actuator functions as the driving source at high frequency, a precise step motion with high speed can be produced. The optimum condition for driving the motor is investigated in terms of excitation frequency, electrical impedance and the location of the bearing set. The rotation speed and torque of the motor is investigated, and 350rpm and 0. l9mNm torque are observed in maximum.