Abstract

Described are the two frontier areas of interest, that is, the measurement of refractive index distribution in gradient index glasses and the precise evaluation and measurement of optical surfaces for high precision optics. Scanning total reflection method and interferometric methods are applied to the refractive index measurement with an accuracy of 10<SUP>-4</SUP> to 10<SUP>-5</SUP>. An AFM is found very useful for the evaluation of non-conductive surfaces as well as multilayers for x-ray optics. Methods for absolute measurement of surface profiles are proposed in consideration of the deformation due to gravity and another method for large surfaces.

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