Abstract

In the present activity the properties of the Si/SiGe MODFET structure with a Si electronic transport channel in SiGe layer is studied. Larger attention is given to the interfaces channel and their influence on the electrical characteristics of a structure. Is shown, that in actual structures the kinetics of molecules disintegration not only determine a structure profile near interfaces, but also can promote the origin of nanostructural compositions in these areas. It can exhibit in a formation of arrays of quantum dots from one of component of solid solution on the layer boundary, resulting to a lot of effects as in longitudinal and transversal conductivity of the epitaxial structure.

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