Abstract
We have investigated an optical waveguide formed by aluminum nitride (AlN) thin film on sapphire. A good quality AlN thin film on sapphire substrate was prepared by metal organic chemical vapor deposition in this laboratory. A rutile prism coupler was employed to display the waveguide modes with the wavelength of 632.8, 532.1, 514.5 and 488.0nm. The refractive index and thickness of the waveguide material is obtained by prism-coupler measurement. The dispersion curve of AlN film is given and the dispersion equation is derived. The attenuation in waveguide is evaluated using scattering loss measurements by using a fiber probe in this experiment. The attenuation coefficient alpha is 1.5-2.1 cm<SUP>-1</SUP> various with different sample and the different modes of waveguide. The accuracy of the measurement is discussed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
