&lt;title&gt;Optical communication link using micromachined corner cube reflector&lt;/title&gt;

Patrick B Chu,Kristofer S J Pister,Erik Berg,Nanping R Lo,M Edward Motamedi,Larry J Hornbeck

doi:10.1117/12.271414

<title>Optical communication link using micromachined corner cube reflector</title>

Patrick B Chu, Kristofer S J Pister + Show 4 more

https://doi.org/10.1117/12.271414

Copy DOI

Publication Date: Apr 11, 1997

Citations: 2

Affiliation: University of California, Los Angeles, University of California, Berkeley

#Corner Cube Reflector #Optical Communication Link + Show 8 more

Abstract
Full-Text PDF
Similar Papers

Abstract

An optical communication link using a micromachined corner cube reflector (CCR) was demonstrated to transmit digital signals over a range of 2 meters by reflecting an interrogating laser from a 5mW laser source. The surface micromachined CCRs are made of 250micrometers square hinged polysilicon plates and have measured reflectance ranging from 34 percent to 77 percent for different mirror designs. LIght reflected by the CCRs has a divergence ranging from 15-35mrad. The CCRs are electrostatically actuated with 10 to 20V. The highest data rate transmitted with a CCR is 1K bps. Theoretical analysis and some dynamic optical test results of the device are presented.

Full Text