Abstract
Lateral polysilicon p+-n-n+ and p+-p- n+ diodes in a series combination of 2 to 5 were fabricated and their electronic properties such as ON- resistance, reverse current and ideality factor were studied. Since the multiple diodes are in series with each other, they have a reduced reverse current. Such a series combination can be used as a single device in applications such as x-ray sensing arrays, which need switching devices with reverse current lower than 1 by 10-12 A and forward current more than 1 by 10-6 A. The ON- resistance and the ideality facto increase linearly with the number of diodes in series. This behavior is attributed to the effect of series combination of diodes.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
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