Abstract

We demonstrate a new purely optical based real-time method for excitation and detection of acoustic and thermal disturbances in thin films. The technique is applied to the determination of viscoelastic properties of unsupported and silicon-supported polyimide thin (approximately 1 micron) films. By comparing data from supported films with that from unsupported films, we demonstrate the sensitivity of this technique to delaminations. We then present calculations that suggest how the same technique may be used to probe film-substrate adhesive quality.© (1993) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

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