<title>New principles of diagnostics of surface parameters of solids by methods of x-ray total external reflection</title>

Abstract

The series of GaAs and SiO₂ samples with the specially prepared one- and two-dimensional surface reliefs have been investigated by the methods of integral and differential curve of X-ray total external reflection. The direct and inverse problems were solved, taking into consideration data obtained by the method of atomic-force microscopy. The theoretical curves of total external reflection are calculated and the parameters describing a surface relief of the samples are restored. The fractal approach for describing of the shape of differential curves and surface profiles was used.