Abstract
The scattering of N2 from Si(100) was studied using state-selective detection and molecular beam techniques. Both trapping-desorption and direct inelastic scattering channels were observed. For an incident N2 energy of 0.08 eV, the trapping-desorption probability was found to be essentially unity for surface temperatures between 93 K and 573 K. The velocity and rotational state distributions of the desorbing molecules show that the nitrogen is fully accommodate with the surface. For an incident energy of 0.29 eV, a direct inelastic channel as well as the trapping-desorption channel was present. The rotational state distributions of both channels were studied as a function of surface temperature and incident energy.© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
