Abstract
Micro riblets have been designed and fabricated by surface- micromachining technology with 3-layer polysilicon and 2-layer PSG. The riblets with rib-peak-widths of 3, 4, 6 micrometers and spacings of 100 micrometers and 300 micrometers have been chosen. Several more complicated surface patterns like fish scale replica, have also been designed. On the same chip, the micromachined hot film shear stress sensor with different geometries (6 X 100, 12 X 100, 18 X 100 micrometers <SUP>2</SUP>, etc.) are integrated downstream from the micro riblets. The sensors are made of polysilicon and used for the shear stress measurement of the fluid flowing over micro riblets.
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