Abstract
Presented is an assembling method for the fabrication of a piezoelectric miniature motor. The fabrication is done by placement and soldering of actuator elements to a substrate. The assembly of the miniature motor demands high precision (plus or minus 1 micrometer), four-axes positioning which is fulfilled by a special micropositioning stage. A particular assembling sequence is used and critical process and performance parameters are evaluated. One of the important factors is the joint strength between actuator element and substrate. A joint strength as high as 100 MPa has been measured which would allow for torque values in the range of 15 mNm for a 4 mm diameter motor.
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