<title>Linear and angular velocity and displacement sensors for industrial use based on planar optical technology</title>

Abstract

An overview will be given for a series of compact optical systems for measurement of surface displacement. These systems are particularly well suited for miniaturization due to the limited demand for spatial and temporal coherence of the source. Specifically, systems for linear and angular displacement will be described. The systems have been realized based on the use of holographic optical elements but implementations with various kinds of compact diffractive optical elements will be devised. Common features with most of the proposed systems are the use of common-path interferometry and the simultaneous recording of the transmitter and receiver optics, strongly reducing any demand for alignment after assembly. Further, the use of common path systems will reduce the sensitivity to optical turbulence and may reduce the influence of contamination of the optical window.