Abstract
A phase-shifting interferometer with a laser diode has been studied that is insensitive to the changes in laser power associated with the current variation. The tested phase is measured from six interferograms by using a newly-developed phase-extraction algorithm. The phase is calculated from a least-squares fit to an interferogram including the intensity variation by the power change. The systematic phase error with the periodicity of 2(pi) rad by the power change of the laser diode has been theoretically investigated as compared with the experimental results for the conventional phase-extraction algorithm. A good agreement between them is shown.© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
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