<title>Large-area diamond-like carbon films prepared by pulsed vacuum arc deposition on silicon lens</title>

Abstract

Diamond-like carbon, as anti-reflective and protective films, are prepared on silicon lens with φ150mm diameter. The measurement results show that uniformity error is less than 3% at range of φ150mm, the peak transmittance value is near to theory value, the films have excellent wear-resistance. Films' surface roughness is less than 10 nanometer from the atomic force microscopy image.