Abstract
In this work there is described the improved construction of laser cavity which makes possible to form submicron periodic structures on the surface of such perspective but not high- reflective materials as semiconductor single-crystals. The experimental investigation of the intracavity processing of the pure single-crystalline surface of germanium and silicon by means of 1.06-micrometer radiation of neodymium glass laser shows that 0.3-micrometer width periodic structures may be formed even on the surfaces with the reflection coefficient lower than 40 percent.
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